MEMS

Piezoelectric actuator is one of the most development prospects in MEMS actuators.

压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一.

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A RF MEMS switch is designed by computer aided design ( CAD ) method.

应用计算机辅助设计 ( CAD ) 方法模拟设计一种射频微机械(RF-MEMS)开关.

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The compensating method for MEMS gyroscope random drift error is discussed.

从工程实用的角度出发,探讨了MEMS陀螺仪随机漂移误差的有效补偿方法.

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A micro direct methanol fuel cell ( μ DMFC ) using MEMS technology is reported.

报道了一种利用MEMS技术制作的微型直接甲醇燃料电池.

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Polyimide has become a main material for sacrificial layer in MEMS switch.

目前,聚酰亚胺已成为MEMS开关中一种主要的牺牲层材料.

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Design and phase noise analysis of a MEMS varactor is presented.

给出了一种MEMS压控电容的设计和相位噪声分析结果.

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The development of Power MEMS is associated with MEMS closely.

PowerMEMS (功率微机电系统)与MEMS( 微机电系统)发展密切相关.

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It is useful for the design and researchment of MEMS devices.

这对MEMS器件的设计与研究具有重要意义.

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Studying on dynamic characteristic of MEMS micro - device depends on relevant testing system.

MEMS微器件动态特性的研究需要相应的测试系统.

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A MEMS sensor research platform based on micro - converter AD μ C 832 is presented.

提出一种基于微转换器(Micro-Converter)的MEMS传感器组合研究平台.

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The widely use of MEMS prompted the extensive research of Power MEMS.

随着微机电系统(MEMS) 的快速发展,为MEMS提供 电能的微小型功率器件(PowerMEMS)逐步得到了广泛的研制.

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Then, communication devices based on MEMS technology their applications are reviewed.

重点综述了基于MEMS技术的通信器件及其应用.

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MEMS material database is a necessary tool for MEMS design.

MEMS材料数据库已经成为MEMS设计领域中必不可少的设计工具.

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The automatic optimization algorithms of structural parameters of MEMS devices are studied.

研究了MEMS器件结构参数的自动优化算法及其实现技术.

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A survey of current international research on MEMS is presented.

本文对国外微电子机械系统(MEMS) 的研究现况作了评述.

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