rie

The waveguide device was fabricated by - coating films , using aluminum as mask and oxygen reactive ion etching.

我们采用旋涂 、 铝掩膜和氧反应离子刻蚀的方法(RIE)制得了聚合物阵列式光波导器件.

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The antigen - detecting RIE for human rabies vaccine was established and optimized.

应用火箭电泳法(RIE)建立并优化了人用狂犬病疫苗抗原的检测方法.

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DOE's fabrication techniques mainly include beam or beam writing, RIE, ion milling and thin film deposition.

衍射光学元件的制作技术主要包括激光或电子束直写 、 反应离子刻蚀 、 离子束铣及薄膜沉积.

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